Please use this identifier to cite or link to this item: http://hdl.handle.net/2381/19176
Title: Effect of focused ion beam milling on microcantilever loss
Authors: Anthony, CJ
Prewett, PD
Cheneler, D
Sabouri, A
Torricelli, G
Binns, C
First Published: Apr-2011
Citation: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (4)
DOI Link: 10.1088/0960-1317/21/4/045031
ISSN: 0960-1317
eISSN: 1361-6439
Links: http://hdl.handle.net/2381/19176
Type: Journal Article
Appears in Collections:Published Articles, Dept. of Physics and Astronomy

Files in This Item:
There are no files associated with this item.


Items in LRA are protected by copyright, with all rights reserved, unless otherwise indicated.