Please use this identifier to cite or link to this item: http://hdl.handle.net/2381/19505
Title: REACTIVE MAGNETRON SPUTTER-DEPOSITION OF CNX FILMS ON SI(001) SUBSTRATES - FILM GROWTH, MICROSTRUCTURE AND MECHANICAL-PROPERTIES
Authors: SJOSTROM, H
IVANOV, I
JOHANSSON, M
HULTMAN, L
SUNDGREN, JE
HAINSWORTH, SV
PAGE, TF
WALLENBERG, LR
First Published: 15-Jun-1994
Publisher: ELSEVIER SCIENCE SA LAUSANNE
Citation: THIN SOLID FILMS, 1994, 246 (1-2), pp. 103-109
DOI Link: 10.1016/0040-6090(94)90738-2
ISSN: 0040-6090
Links: http://hdl.handle.net/2381/19505
Type: Journal Article
Appears in Collections:Published Articles, Dept. of Engineering

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